Ultrathin-Mo-Enabled NC-NAND with Sub-3.5 nm HZO for Scalable High-MW Operation 

Year

2025 

Author

Sangho Lee, Yongsu Kim, Yangjin Jung, Seungyeon Chang, Seokjoong Shin, Giuk Kim, Hongrae Joh, Woongin Kim, Sanghyun Park, Kwangyou Seo, Kwangsoo Kim, Wanki Kim, Daewon Ha, Jinho Ahn, Sanghun Jeon 

Conference

2025 IEEE International Electron Devices Meeting (IEDM) 

Status

Accepted