Record-Low EOT(3.6Å) & Jleak(7×10-8A/cm2@0.8V) HZO by Dielectric-Selective Microwave Annealing
- Year
- 2025
- Author
- Hunbeom Shin, Giuk Kim, Sujeong Lee, Geonhyeong Kang, Hyojun Choi, Taeseung Jung, Sanghun Jeon
- Conference
- IEEE International Reliability Physics Symposium (IRPS)
- Status
- Accepted
- Link
- http://doi.org/10.1109/IRPS48204.2025.10983902 519회 연결
