ANTONIS Lab Publication

Patent

Semiconductor device having a gate contact structure capable of reducing interfacial resistance and method of forming the same
Year of publication
2010
Inventor
Chang-seok Kang, Yoo-Cheol Shin, Jung-Dal Choi, Jong-Sun Sel, Ju-Hyung Kim, Sang-Hun Jeon
Application No.
11797401
Application date
Registration No.
US7776687B2
Registration date