Enhancing performance of microbolometers by utilizing low-temperature polycrystalline silicon

Author

Taeseung Jung, Seungyeob Kim, Sangho Lee, Jinho Ahn, Sanghun Jeon

Journal

Journal of Vacuum Science & Technology B

Status

Accepted

Year

2024

Link

https://doi.org/10.1116/6.0003901 1090회 연결