"Effect of Hydrogen on Hafnium Zirconium Oxide Fabricated by Atomic Layer Deposition Using H2O2 Oxidant"
Hyoungkyu Kim, Seokjung Yun, Tae Ho Kim, Hoon Kim, Changdeuck Bae, Sanghun Jeon, Seungbum Hong,
physica status solidi (RRL)–Rapid Research Letters,
15,
2100020