Crystalline phase-controlled high-quality Hafnia ferroelectric with RuO₂ electrode

Author

Youngin Goh, Sung Hyun Cho, Sang-Hee Ko Park, Sanghun Jeon

Journal

IEEE Transactions on Electron Devices

Vol

67

Page

3431-3434

Year

2020

Link

https://ieeexplore.ieee.org/abstract/document/9121683 1204회 연결