First-order reversal curve diagrams for characterizing ferroelectricity of Hf0.5Zr0.5O2 films grown at different rates

Author

Youngin Goh, Sanghun Jeon

Journal

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Vol

36

Page

052204

Year

2018

Link

https://avs.scitation.org/doi/full/10.1116/1.5046762 1069회 연결