Improved Ferroelectric Switching in Sputtered HfZrOx Device Enabled by High Pressure Annealing

Author

Jiyong Woo, Youngin Goh, Solyee Im, Jeong Hyeon Hwang, Yeriaron Kim, Jeong Hun Kim, Jong-Pil Im, Sung-Min Yoon, Seung Eon Moon, Sanghun Jeon

Journal

IEEE Electron Device Letters

Vol

41

Page

232-235

Year

2019

Link

https://ieeexplore.ieee.org/abstract/document/8933133 684회 연결