Effect of Hydrogen on Hafnium Zirconium Oxide Fabricated by Atomic Layer Deposition Using H2O2 Oxidant

Author

Hyoungkyu Kim, Seokjung Yun, Tae Ho Kim, Hoon Kim, Changdeuck Bae, Sanghun Jeon, Seungbum Hong

Journal

physica status solidi (RRL)–Rapid Research Letters

Vol

15

Page

2100020

Year

2021

Link

https://onlinelibrary.wiley.com/doi/full/10.1002/pssr.202100020 958회 연결