Ultra-thin Hf0.5Zr0.5O2 thin-film-based ferroelectric tunnel junction via stress induced crystallization

Author

Youngin Goh, Junghyeon Hwang, Yongsun Lee, Minki Kim, Sanghun Jeon

Journal

Applied Physics Letters

Vol

117

Page

242901

Year

2020

Link

https://aip.scitation.org/doi/full/10.1063/5.0029516 930회 연결