Effect of high pressure anneal on switching dynamics of ferroelectric hafnium zirconium oxide capacitors

Author

Batzorig Buyantogtokh, Venkateswarlu Gaddam, Sanghun Jeon

Journal

Journal of Applied Physics

Vol

129

Page

244106

Year

2021

Link

https://aip.scitation.org/doi/full/10.1063/5.0050535 755회 연결