Enabling large ferroelectricity and excellent reliability for ultra-thin hafnia-based ferroelectrics with a W bottom electrode by inserting a metal-nitride diffusion barrier

Author

Minki Kim, Youngin Goh, Junghyeon Hwang, Sanghun Jeon

Journal

Applied Physics Letters

Vol

119

Page

262905

Year

2021

Link

https://aip.scitation.org/doi/full/10.1063/5.0072692 802회 연결