Enhancement of electrical properties of a-IGZO thin film transistor by low temperature (150 °C) microwave annealing for flexible electronics

Author

Taeseung Jung, Jung Hoon Han, Sooji Nam, Sanghun Jeon

Journal

Journal of Vacuum Science & Technology B

Status

Accepted

Vol

Volume 41, Issue 3

Page

032201

Year

2023

Link

https://doi.org/10.1116/6.0002343 913회 연결