Kinetically Stabilized Hafnia Ferroelectric of Al-Doped HfO2 Film by Fast Ramping and Fast Cooling Process

Author

Lingwei Zhang, Giuk Kim, Sangho Lee, Hunbeom Shin, Youngjin Lim, Kang Kim, Il-Kwon Oh, Sang-Hee Ko Park, Jinho Ahn, Sanghun Jeon

Journal

IEEE Transactions on Electron Devices

Status

Accepted

Year

2024

Link

https://doi.org/10.1109/TED.2024.3475308 882회 연결