First Demonstration of Thermally Stable Zr:HfO2 Ferroelectrics Via Inserting AlN Interlayer

Author

Sangmok Lee, Giuk Kim, Sangho Lee, Hunbeom Shin, Youngjin Lim, Kang Kim, Do Hyung Kim, Il-Kwon Oh, Sang-Hee Ko Park, Jinho Ahn, Sanghun Jeon

Journal

IEEE Electron Device Letters

Status

Accepted

Year

2024

Link

https://ieeexplore.ieee.org/abstract/document/10594739 1249회 연결