Achieving Morphotropic Phase Boundary at Extremely Low-Temperature (200 ∘C) in HZO (>10 nm) Films Using Microwave Annealing

Author

Taeseung Jung, Hunbeom Shin, Jinho Ahn, Sanghun Jeon

Journal

IEEE Transactions on Electron Devices

Status

Accepted

Year

2025

Link

http://10.1109/TED.2025.3560925 814회 연결