Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing

Author

Geonhyeong Kang, Hunbeom Shin, Seungyeob Kim, Lingwei Zhang, Giuk Kim, Sujeong Lee, Yunseok Nam, Chaeheon Kim, Hoon Kim, Jinho Ahn, Sanghun Jeon

Journal

Journal of Vacuum Science & Technology B

Status

Accepted

Year

2025

Link

https://doi.org/10.1116/6.0004086 1975회 연결