"Enhancement of performance and reliability in MOSFETs via high-pressure microwave annealing"
Geonhyeong Kang, Hunbeom Shin, Seungyeob Kim, Lingwei Zhang, Giuk Kim, Sujeong Lee, Yunseok Nam, Chaeheon Kim, Hoon Kim, Jinho Ahn, Sanghun Jeon,
Journal of Vacuum Science & Technology B,
Accepted,